Table 2
iVoc,max measurements obtained from QSSPC measurement conducted on both dislocation free and dislocated region for three materials, Cz, CM-UMG and CM-SoG. The results are averaged out of 4–6 wafers.
iVoc,max in dislocation free region (mV) | iVoc,max in dislocated region (mV) | |
---|---|---|
Cz | 710 | NA |
CM-UMG | 704 | 694 |
CM-SoG | 703 | 678 |
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