Fig. 2

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IR absorption coefficient spectra of Oi (left) at 1132-1138 cm−1 and of VH4 (right) at 2223 cm−1 for differently processed n-type FZ-Si samples. Additionally, a non-processed n-type FZ-Si sample is used as a comparison alongside the processed and fired reference sample. Since the two reference curves overlap, the line of the as-cut reference sample is dashed for better visualization.
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