Fig. 5


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Reverse bias current Irev at −12 V for i-TOPCon solar cells (n-type Cz-Si, M2) with LPCVD in-situ and ex-situ doped poly-Si and with “in-situ annealed” LPCVD and PECVD with different poly-Si removal processes: ADE − atmospheric dry etching, alkaline batch process and alkaline inline process. Mean ± standard deviation.

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