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EDX investigation of the material composition in the iso-cut scribe lines as a function of the applied laser fluence. The blue open circles are assigned to elemental Zn (L line), which is an indicator for the window layer stack (left y-axis). The black squares refer to elemental Cu (L line), which represents the underlying CIGSe absorber (right y-axis). The selected fluence is marked with an asterisk.
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