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Comparison of SEM images of iso-cut scribe lines patterned with three characteristic fluences: (A) 0.28 J/cm2 (incomplete separation), (B) 0.53 J/cm2 (optimal scribe line properties), and (C) 1.18 J/cm2 (onset of transforming the CIGSe absorber into a conductive phase). The color bars indicate the respective patterning regimes and the chosen patterning fluences. The magnification of the images is 1000×, the excitation voltage is 10 kV.
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