Fig. 3


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Comparison of SEM images of P1 scribe lines patterned with three characteristic fluences: (A) 1.16 J/cm2 (incomplete layer ablation), (B) 3.36 J/cm2 (optimal scribe line properties), and (C) 5.79 J/cm2 (onset of glass damages). The color bars indicate the respective patterning regimes and the chosen patterning fluences. The magnification the images is 1000×, the excitation voltage is 10 kV.

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