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Comparison of SEM images of P3 scribe lines, patterned with (A) 1.82 J/cm2, (B) 3.16 J/cm2, (C) and 5.12 J/cm2 resulting in incomplete separation, optimal scribe line properties, and the onset of phase transformation of the underlying CIGSe absorber layer, respectively. The color bars above and below mark the optimal fluences for patterning and summarize the substantial findings, respectively. The magnification the images is 1000×, the excitation voltage is 10 kV.
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