Fig. 1

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(a) Mg/(Zn+Mg) content in Zn1−xMgxO films as determined by XPS as function of the nominal value based on the number of pulses. (b) Zn1−xMgxO film thickness with number of deposition pulses as determined by ellipsometry. A linear fit (line) results in layer growth of 1.65 Å per pulse.

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