Table 1
Extraction of VOC, JSC, FF and η from I-V measurement using Oriel and SunVoc (SINTON) setups.
| Silicon | PIII Boron | Passivation | Setup | V OC | J SC | FF | η |
| Emitter (IBS) | layer | (mV) | mA/cm2 | (%) | (%) | ||
|
|
|||||||
| Fz-Si-1 | BF3: | PECVD | Oriel | 593.1 | 38.8 | 70.1 | 16.1 |
| 200 μm | E:8 kV | ||||||
| 2 Ω cm | D:5 × 1013 cm-2 | SiOX + SiNX | Sun-Voc | 582.0 | 75,2 | 16.9 | |
|
|
|||||||
| Fz-Si-2 | BF3: | PECVD | Oriel | 596.9 | 38.7 | 69.3 | 16.7 |
| 200 μm | E = 15 kV | ||||||
| 2 Ω cm | D = 5 × 1015 cm-2 | SiOX + SiNX | Sun-Voc | 586.0 | 75.0 | 17.7 | |
|
|
|||||||
| Fz-Si-2 | BF3: | Thermal | Oriel | 559:1 | 36.2 | 63.4 | 12.9 |
| 200 μm | E = 15 kV | ||||||
| 2 Ω cm | D = 1 × 1016 cm-2 | SiO2 + SiNX | Sun-Voc | 555.0 | 73.3 | 14.7 | |
|
|
|||||||
| n-RST | BF3: | Thermal | Oriel | 534.0 | 27.4 | 55.7 | 82 |
| 100 μm | E = 15 kV | ||||||
| 2 Ω cm | D = 5 × 1015 cm-2 | SiO2 + SiNX | Sun-Voc | 532.0 | 68.6 | 10.0 | |
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