Issue |
EPJ Photovolt.
Volume 4, 2013
Topical issue: Photovoltaic Technical Conference (PVTC 2012)
|
|
---|---|---|
Article Number | 45105 | |
Number of page(s) | 4 | |
DOI | https://doi.org/10.1051/epjpv/2013018 | |
Published online | 10 September 2013 |
https://doi.org/10.1051/epjpv/2013018
Plasma immersion ion implantation of boron for ribbon silicon solar cells
1
InESS-CNRS-Univ. Strasbourg,
France
2
IBS, Peynier, France
3
Solarforce, Bourgoin-Jallieu, France
4
Université d’Aix-Marseille, Institut Fresnel,
Marseille,
France
a
e-mail: thomas.michel@ion-beam-services.fr
Received: 18 September 2012
Accepted: 5 April 2013
Published online: 10 September 2013
In this work, we report for the first time on the solar cell fabrication on n-type silicon RST (for Ribbon on Sacrificial Template) using plasma immersion ion implantation. The experiments were also carried out on FZ silicon as a reference. Boron was implanted at energies from 10 to 15 kV and doses from 1015 to 1016 cm-2, then activated by a thermal annealing in a conventional furnace at 900 and 950 °C for 30 min. The n+ region acting as a back surface field was achieved by phosphorus spin-coating. The frontside boron emitter was passivated either by applying a 10 nm deposited SiOX plasma-enhanced chemical vapor deposition (PECVD) or with a 10 nm grown thermal oxide. The anti-reflection coating layer formed a 60 nm thick SiNX layer. We show that energies less than 15 kV and doses around 5 × 1015 cm-2 are appropriate to achieve open circuit voltage higher than 590 mV and efficiency around 16.7% on FZ-Si. The photovoltaic performances on ribbon silicon are so far limited by the bulk quality of the material and by the quality of the junction through the presence of silicon carbide precipitates at the surface. Nevertheless, we demonstrate that plasma immersion ion implantation is very promising for solar cell fabrication on ultrathin silicon wafers such as ribbons.
© Derbouz et al., published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License
(http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.