Thickness measured by XRR and refractive index determined by optical simulation.
|Sample||Thickness (nm)||Refractive Index (n)|
|Boron 48 W||37.6||1.442|
|Boron 98 W||40.7||1.468|
|Boron 196 W||48.3||1.617|
|Phosphorus 18 W||40.0||1.444|
|Phosphorus 36 W||45.8||1.451|
|Phosphorus 72 W||60.8||1.474|
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