Table 1

Thickness measured by XRR and refractive index determined by optical simulation.

Sample Thickness (nm) Refractive Index (n)

Boron 48 W 37.6 1.442
Boron 98 W 40.7 1.468
Boron 196 W 48.3 1.617
Phosphorus 18 W 40.0 1.444
Phosphorus 36 W 45.8 1.451
Phosphorus 72 W 60.8 1.474

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