Fig. 5
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Saturation current density J0 values of SiOx/p-poly Si surface passivation after coating with AlOx/SiN and firing. The wet chemical SiOx with improved in-situ-doped LPCVD p-poly recipe yields a new best median J0 = 4 ± 1 fA/cm2 with very low spread. Each data point corresponds to one test wafer.
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