Fig. 3
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Process flow and QSSPC measurement results of POLO IBC lifetime precursors processed at Kalyon PV using their Ga-doped M10 Cz wafers and their PERC+ mass production tools for wet chemistry, PECVD AlOx/SiN, and firing. The lifetime samples achieve an implied Voc up to 727 mV demonstrating a suitable surface passivation quality of the industrial process tools.
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