Flowchart of the honeycomb texturing approach. A schematic representation of the silicon surface and additional layers phase is presented on the left. Processing steps 1–7 are referenced in the text. Visual A. is optical microscope image of the mask used for exposure. Red lines are added to indicate the honeycomb structure resulting from the used mask. Visual B–E are SEM images at 0 degrees tilt, Visual B indicates the effect of under-etching at step 4. Visuals C–E indicate the effect of etching time during step 6.