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Fig. 10

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Reflective behaviour of Tsp (green, left), Tsac (red, centre) and Thoney (blue, right). Presented are R (top, solid lines) and HR (top, dashed lines) and AID (bottom). AID measurements show normalized intensity (normalized to maximum value) as a function of detector angle (θdet) in reference to the incident light, with the sample positioned at a 10 degree angle, for different wavelengths (λ). For Tsp, R and HR are shown as a function of etching time and AID measurements are shown for samples etched at 6.5 mins (left) and 11 mins (right). For Tsac, R and HR are shown as a function of dasi. R and HR of a flat, polished wafer is included as reference. AID measurements are shown for the sample with dasi = 1500 nm. For Thoney, R and HR are shown as a function of etching time (step 4) for honeycombs with p = 2 μm (R = dashed/dotted, HR = dotted) and p = 3 μm (R = solid, HR = dashed). AID measurements are shown for samples with p = 3 μm etched for 12 mins, with right image showing AID normalized to max value in θdet = 30–90 range.

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