Fig. 2


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SEM pictures of the test samples, (a) 3 nm thick HfOx and (c) 6 nm thick HfOx with 0.4 M NaF, (b) 3 nm thick HfOx and (d) 6 nm thick HfOx with 0.4 M KF solution. The opening sizes and areas were calculated via Gwyddion [9] (Magnification: 800×).

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