Table 3
Sheet resistance: measured value and value calculated from ECVP profiles.
| Wafer | Measured R□ (Ω) | R□ (Ω) calculated from ECVP profile |
|---|---|---|
| P2 | 58 | 56 |
| T2 | 69 | 95 |
| P3 | 39 | 37 |
| T3 | 52 | 58 |
| P4 | 33 | 29 |
| T4 | 43 | 64 |
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