Download original image
Phosphorus profile measured by SIMS on sample P2 and T2 (standard annealing) with a polished and textured surface. For sample T2, the incident ion beam makes an angle of 36° with the normal to the wafer. The green curve shows the profile on the textured sample multiplied by 1.73.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.