Table 2
Thermodynamic properties [11].
| Name | c-Si | a-Si | Si3N4 | Al2O3 |
|
|
||||
| Tm (°C) | 1414 | ~1200 | 1877 | 2072 |
| Tb (°C) | 3217 | 3217 | N.A. | 2977 |
| kth (W/(m °C)) | 150 | <5 | 25 | 18 |
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