Fig. 4


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(a) Experimental (solid lines) and simulated (dashed lines) total reflectance spectra at normal incidence from fabricated samples (1.13 μm and 1.3 μm inverted-pyramids) and bare silicon as a function of wavelength. (b) Measured specular reflectance spectra from 1.3 μm inverted pyramid texture coated with a 70 nm thick SiNx ARC and from a grid-less PERL-cell with dual layer ARC [19] for the various incidence angles shown. (c) Predicted efficiency of a solar cell with the presently fabricated (1.13 and 1.3 μm inverted-pyramid) and the PERL-cell textures at various wafer thicknesses. A 70 nm thick PECVD deposited SiNxARC is considered in efficiency calculations.

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