Tableau 2

Overview of efficiencies obtained with various barrier layer structures on large-area crystalline Si solar cells with local Al-BSF at the rear side and Cu-based contacts at the front side. All barrier layers have been applied by physical vapor deposition (sputtering).

Contact Emitter J sc V oc FF η R s
Layer (mA/cm2) (mV) (%) (%) (Ω cm2)

Ti 60 38.4 639 79.1 19.4 5
Ti 135 38.8 651 75.6 19.1 1.1
Ta 60 38.2 640 77.9 19.0 0.82
TaN 60 38.3 636 77.8 19.0 0.78
T1/7iN 60 38.1 638 77.7 18.9 0.76
Ni 60 38.3 639 77.7 19.0 0.69

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