Fig. 6
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Influence of surface conditioning provided by different cleanings on minority carrier lifetime. The lifetime is given in microseconds and measured at an injection level of 1e15 cm-3. SC1 : NH3 :H2O2 :H2O mixture, HF : hydrofluoric acid, O3 wo HCl : ozone without hydrochloric acid, O3 with HCl : ozone with hydrochloric acid, SC1+N2 dryer : NH3 :H2O2 :H2O mixture + Nitrogen dryer.
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