Fig. 6
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I-V characteristics and QE spectra of n-i-p μc-Si thin-film solar cells with textured AZO. The intrinsic μc-Si :H :Cl layer used was 2 μm thickness and fabricated from a SiH2Cl2 and H2 mixture by rf PE-CVD. Inset shows the XRD pattern of corresponding μc-Si films.
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