Fig. 4
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Total transmittance Ttotal and haze spectra of TPJ-annealed AZO films with different surface morphology. The wet chemical etching was conducted after TPJ annealing by a 0.5% HCl at different dipping times. The TPJ annealing was performed at a vsub of 25 mm/s and a Tmax of 650 °C. The inset shows the AFM images of the 80 and 100 s chemically etched AZO film.
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