Issue |
EPJ Photovolt.
Volume 6, 2015
Topical issue: Photovoltaic Technical Conference (PVTC 2014)
|
|
---|---|---|
Article Number | 65303 | |
Number of page(s) | 7 | |
DOI | https://doi.org/10.1051/epjpv/2015004 | |
Published online | 27 May 2015 |
https://doi.org/10.1051/epjpv/2015004
Impact of deposition parameters on the material quality of SPC poly-Si thin films using high-rate PECVD of a-Si:H
1 Solar Energy Research Institute of Singapore, National University of Singapore, 7 Engineering Drive 1, 117574 Singapore, Singapore
2 Department of Electrical and Computer Engineering, National University of Singapore, 117583 Singapore, Singapore
3 Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 3 Research Link, 117602 Singapore, Singapore
a
e-mail: avishek.kumar@nus.edu.sg
Received: 23 September 2014
Accepted: 4 May 2015
Published online: 27 May 2015
The impact of the deposition parameters such as gas flow (sccm) and RF plasma power density (W/cm2) on the deposition rate of a-Si:H films is systematically investigated. A high deposition rate of up to 146 nm/min at 13.56 MHz is achieved for the a-Si:H films deposited with high lateral uniformity on 30 × 40 cm2 large-area glass substrates. A relationship between the SiH4 gas flow and the RF power density is established. The SiH4 gas flow to RF power density ratio of about 2.4 sccm/mW cm-2 is found to give a linear increase in the deposition rate. The influence of the deposition rate on the material quality is studied using UV-VIS-NIR spectrophotometer and Raman characterisation techniques. Poly-Si thin film with crystal quality as high as 90% of single-crystalline Si wafer is obtained from the SPC of high rate deposited a-Si:H films.
© Kumar et al., published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative
Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted
use, distribution, and reproduction in any medium, provided the original work is
properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.