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Impact of PECVD μc-Si:H deposition on tunnel oxide for passivating contacts

Anatole Desthieux, Jorge Posada, Pierre-Philippe Grand, Cédric Broussillou, Barbara Bazer-Bachi, Gilles Goaer, Davina Messou, Muriel Bouttemy, Etienne Drahi and Pere Roca i Cabarrocas

EPJ Photovolt., 11 (2020) 3

Published online: 04 February 2020

DOI: 10.1051/epjpv/2020001

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EPJ Photovoltaics

Editor-in-Chief: Pere Roca i Cabarrocas, Jean-Louis Lazzari - Editorial board
eISSN: 2105-0716

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