Use of hexamethyldisiloxane for p-type microcrystalline silicon oxycarbide layers Prabal Goyal, Junegie Hong, Farah Haddad, Jean-Luc Maurice, Pere Roca i Cabarrocas and Erik Johnson EPJ Photovolt., 7 (2016) 70301 Published online: 13 January 2016 DOI: 10.1051/epjpv/2015010