Impact of PECVD μc-Si:H deposition on tunnel oxide for passivating contacts Anatole Desthieux, Jorge Posada, Pierre-Philippe Grand, Cédric Broussillou, Barbara Bazer-Bachi, Gilles Goaer, Davina Messou, Muriel Bouttemy, Etienne Drahi and Pere Roca i Cabarrocas EPJ Photovolt., 11 (2020) 3 Published online: 04 February 2020 DOI: 10.1051/epjpv/2020001