Electrical characterization of low temperature plasma epitaxial Si grown on highly doped Si substratesCyril Leon, Sylvain Le Gall, Marie-Estelle Gueunier-Farret, Jean-Paul Kleider and Pere Roca i CabarrocasEPJ Photovolt., 11 (2020) 4DOI: https://doi.org/10.1051/epjpv/2020002