Microcrystalline silicon absorber layers prepared at high deposition rates for thin-film tandem solar cellsS. Michard, V. Balmes, M. Meier, A. Lambertz, T. Merdzhanova and F. FingerEPJ Photovolt., 4 (2013) 45201DOI: https://doi.org/10.1051/epjpv/2013026