Rapid thermal annealing of sputter-deposited ZnO:Al films for microcrystalline Si thin-film solar cellsH. Koshino, Z. Tang, S. Sato, H. Shimizu, Y. Fujii, T. Hanajiri and H. ShiraiEPJ Photovolt., 3 (2012) 35001DOI: https://doi.org/10.1051/epjpv/2012002