Effect of annealing on properties of sputtered and nitrogen-implanted ZnO:Ga thin filmsK.S. Shtereva, V. Tvarozek, I. Novotny, P. Sutta, M. Milosavljevic, A. Vincze, M. Vojs and S. FlickyngerovaEPJ Photovolt., 3 (2012) 35003DOI: https://doi.org/10.1051/epjpv/2012006
