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On the Influence of the SiN x Composition on the Firing Stability of Poly‐Si/SiN x Stacks

Bernd Steinhauser, Frank Feldmann, Daniel Ourinson, Henning Nagel, Tobias Fellmeth and Martin Hermle
physica status solidi (a) 217 (21) 2000333 (2020)
DOI: 10.1002/pssa.202000333
See this article