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This article has been cited by the following article(s):
On the Influence of the SiN x Composition on the Firing Stability of Poly‐Si/SiN x StacksBernd Steinhauser, Frank Feldmann, Daniel Ourinson, Henning Nagel, Tobias Fellmeth and Martin Hermle
physica status solidi (a) 217 (21) 2000333 (2020)
See this article