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Cited article:

UV and IR laser induced ablation of Al₂O₃/SiN:H and a-Si:H/SiN:H

T. Schutz-Kuchly, A. Slaoui, J. Zelgowski, A. Bahouka, M. Pawlik, J.-P. Vilcot, E. Delbos, M. Bouttemy, R. Cabal

EPJ Photovolt., 5 (2014) 55201

Published online: 2014-01-22

DOI: https://doi.org/10.1051/epjpv/2013027

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