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Cited article:

Solar‐grade boron emitters by BF3 plasma doping and role of the co‐implanted fluorine

Adeline Lanterne, Jérôme Le Perchec, Marianne Coig, Frédéric Milési, Julie Boucher and Yannick Veschetti
Progress in Photovoltaics: Research and Applications 24 (3) 348 (2016)
https://doi.org/10.1002/pip.2713

Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation

Yu-Hsien Lin, Yung-Chun Wu, Hsin-Chiang You, Chun-Hao Chen, Ping-Hua Chen, Yi-He Tsai, Yi-Yun Yang and K. Chang-Liao
Energies 7 (6) 3653 (2014)
https://doi.org/10.3390/en7063653