Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

This article has been cited by the following article(s):

Stability study: Transparent conducting oxides in chemically reactive plasmas

Krishna Nama Manjunatha and Shashi Paul
Applied Surface Science 424 316 (2017)
DOI: 10.1016/j.apsusc.2017.03.173
See this article

Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition

A V Uvarov and A S Gudovskikh
Journal of Physics: Conference Series 1038 012108 (2018)
DOI: 10.1088/1742-6596/1038/1/012108
See this article

Quadruple-junction solar cells and modules based on amorphous and microcrystalline silicon with high stable efficiencies

Simon Kirner, Sebastian Neubert, Christof Schultz, et al.
Japanese Journal of Applied Physics 54 (8S1) 08KB03 (2015)
DOI: 10.7567/JJAP.54.08KB03
See this article

On the Plasma Chemistry During Plasma Enhanced Chemical Vapor Deposition of Microcrystalline Silicon Oxides

Onno Gabriel, Simon Kirner, Max Klingsporn, et al.
Plasma Processes and Polymers 12 (1) 82 (2015)
DOI: 10.1002/ppap.201400114
See this article

Nanocrystalline silicon emitter optimization for Si-HJ solar cells: Substrate selectivity and CO2plasma treatment effect

Luana Mazzarella, Simon Kirner, Onno Gabriel, et al.
physica status solidi (a) 214 (2) 1532958 (2017)
DOI: 10.1002/pssa.201532958
See this article

Improved Process Stability on an Extremely Thin Amorphous/Crystalline Silicon Interface Passivation Layer by Using Predeposition on the Chamber Wall

Yu-Lin Hsieh, Ching-Lin Tseng, Chien-Chieh Lee, et al.
ECS Journal of Solid State Science and Technology 7 (8) P355 (2018)
DOI: 10.1149/2.0041808jss
See this article

Solar cells for self-sustainable intelligent packaging

António Vicente, Hugo Águas, Tiago Mateus, et al.
Journal of Materials Chemistry A 3 (25) 13226 (2015)
DOI: 10.1039/C5TA01752A
See this article

In - situ diagnostics of PECVD AlO x deposition by optical emission spectroscopy

Kyung Kim, Saul Winderbaum and Ziv Hameiri
Surface and Coatings Technology 328 204 (2017)
DOI: 10.1016/j.surfcoat.2017.08.034
See this article

Artificial Leaf for Water Splitting Based on a Triple-Junction Thin-Film Silicon Solar Cell and a PEDOT:PSS/Catalyst Blend

Peter Bogdanoff, Diana Stellmach, Onno Gabriel, et al.
Energy Technology 4 (1) 230 (2016)
DOI: 10.1002/ente.201500317
See this article

An Automatic Condition Detection Approach for Quality Assurance in Solar Cell Manufacturing Processes

Juan Du, Xi Zhang and Qingpei Hu
IEEE Robotics and Automation Letters 2 (3) 1825 (2017)
DOI: 10.1109/LRA.2017.2708126
See this article

Catalytic Chemical Vapor Deposition

Catalytic Chemical Vapor Deposition 11 (2019)
DOI: 10.1002/9783527818655.ch2
See this article

Parametric study and residual gas analysis of large-area silicon-nitride thin-film deposition by plasma-enhanced chemical vapor deposition

Dong Xiang, Huanxiong Xia, Wang Yang and Peng Mou
Vacuum (2019)
DOI: 10.1016/j.vacuum.2019.04.017
See this article