Fig. 1

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(a) Variations (not to scale) of indium (in blue) and gallium (in red) source temperatures during the first and the third stage of the implemented process. (b) Evolution of atom fluxes calculated from calibration curves (i.e. rate versus source temperature). In black is represented the ratio of group III atom fluxes during the first and third stage; in red is plotted the evolution of Cu atom flux during the second stage.

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