Fig. 7


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Pad height in correlation to increased reverse current flow illustrated in LIT measurement. The locally increased current flow at the n-pad edges (left) in relation to the pad's height profile (below). In addition, a 3D-image of the n-pad showing an increase pad height at the circular edges (right)where reverse currents are high. Note that the frequent linear embossments in the 3D-image are measurement artefacts originating from the stitching of the microscopic images.

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