LIT images of Schottky and MIS contact (AlO_X) combined in via and n-pads. At −2 V the current passes through the Schottky contact in the vias. At −5 V the current passes through the Schottky contact in the vias as well as through the MIS contact below the n-pads. At −10 V all MIS contacts contribute significantly to the current flow. Note that the LIT-signal count scales of the pictures are unrelated to visualize the low counts at low voltages.