Open Access

Table 1

Degradation ratio obtained experimentally with a 100 nm thick Al layer. The theoretical values are calculated using the measured filling factor.

Shape of Filling factor ff Degradation ratio r
the pattern Measured Expected Experiment Simulation

Square 0.330 0.360 1.99 2.08
0.455 0.500 2.85 2.80
0.603 0.640 4.35 4.17

Round 0.335 0.360 2.03 2.00
0.607 0.640 4.43 4.43

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